Gases used in the semiconductor industry are collectively referred to as electronic gases.
It can be divided into three categories: pure gas, high purity gas and semiconductor special material gas.

The special material gas is mainly used in epitaxial, doping and etching processes, and the high purity gas is mainly used as dilution gas and carrier gas.

Electronic gas is an important branch of special gas. It is also an indispensable raw material for the production of ultra-large scale integrated circuits, planar display devices, compound semiconductor gas components, solar cells, fiber optics and other electronic industries. They are widely used in thin film, etching, miscellaneous, vapor deposition, diffusion and so on. Its purity and cleanliness directly affect the quality, integration, specific technical index and finished rate of photoelectronic and microelectronic components, and fundamentally restrict the accuracy and accuracy of circuits and gas components.
In recent years, with the rapid development of VLSI, flat panel display and other industries in Taiwan, the demand for electronic gas has increased significantly.